Smart Nano-Structured Tiania-MEMS Multi-Gas Sensor for High Temperature and Harsh Fossil Environment Applications


Nano Structured-Titania Sensing Platform
Nano Structured-Titania Sensing Platform
Pimems, Inc.
Website:  Pimems, Inc.
Award Number:  SC0012029
Project Duration:  06/09/2014 – 03/08/2015
Total Award Value:  $149,995
DOE Share:  $149,995
Performer Share:  $0
Technology Area:  Plant Optimization Technologies
Key Technology:  Sensors and Controls
Location:  Santa Barbara, CA

Project Description

The goal of this work is to introduce an advanced titania-based multivariate microelectromechanical systems (MEMS) technology gas sensor. The project’s approach is to use oxidation-resistant substrates such as Ti, Al, and Cr alloys to produce arrays of doped nano-structured TiO2 MEMS gas sensors and combine these on a single platform. A single-platform, multi-sensor system enables us to accurately detect multiple gases simultaneously, including O2, H2, CO2 and NOX. The sensor is designed to be effective in harsh, multi-gas environments at temperatures and pressures ranging from 20 °C to 1200 °C and 15 to 1000 psi.

Project Benefits

The primary application of the proposed sensor will be to monitor emitted combustion gases for coal power generation plants, gas turbines, and gasifiers. The value incentive for end users is to accurately monitor gas concentrations to improve system efficiency, minimize wear on equipment, and produce accurate emissions reports for regulatory purposes.

Contact Information

Federal Project Manager 
Jessica Mullen:
Technology Manager 
Robert Romanosky:
Principal Investigator 
Payam Bozorgi:

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